ʱ : һ 基于超深亚微米工艺的E-fuse 存储电路的设计与研究 - 百度文库ϿʼĶ
ڳյE-fuse洢·о 55nmյ4K E-fuse·
strobeźţloadpgenbcsbźŹͬдźwrite_wl enoutźţӸߵƽloadcsbźͨһϵе·saeźţƷŴ·ģĹ
loadźţƷŴģ·ĹźΪߵƽʱݴ洢 fsourceźţźŵѹˣ·ڱ̵·ʱfsourceźŽӸߵѹVDQΪfuseṩ㹻ߵĵ۶˿
dout<7:0>źţźŶˡ
Ͻܵź⣬·еԴѹźŶˣһĵ·ͬ˵·ĵԴѹΪVDQVDDGNDϤĵ·һVDQѹˡVDQѹڱ¶ྦྷ˿Ʊ̺ͶȡźӵĵԴѹVDDԴѹߣVDDΪԴѹGNDΪءƵĵ·е͵VDQֵΪ3VVDDֵΪ1.2VGNDΪ0VΪ˷ֹıźţѹVDD͵ѹVDQһǰʱƣԴVDDȶVDQܿڵԴѹVDDǰVDQӦѾΪѹ0Vͼ3.2ʾ
VoltageVoltageVDQVDDVDQVDDOnTimeOffTime
ͼ3.2 ѹVDD͵ѹVDQʱʾͼ
3.1.2 Ŵṹģ
E-fuse洢кģ飬ֱǵ·̿źš·ȡźŲģ飬洢ģ飬Ŵģ顣ͼ3.3ΪŴģṹʾͼ
ͼ֪·ͨźys෴źysbַŴ·
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55nmյ4K E-fuse· ڳյE-fuse洢·о
ʹʮλΪλݣʵ512*8Ĵ洢ʽô˷ʽԺܺõоƬʹ·ŻźblΪfuseֵ̺rblΪο˴洢ֵrblΪڲźţ·saŴģڲ
rbl<0>bl<0>ysread_dop<3:0>read_wlsaeypsabs_wb<0>bs_wb<1>ysbyssaoutdoutdoutsaysbbl<1>rbl<1>saecs
ͼ3.3 Ŵṹʾͼ
3.1.3 洢ռͿźʱ
ڴ˵·Уʮλַźadd<11:0>Ӧ256*16ı̿ռ䣬512*8Ķȡݿռ䣬ڱ̲ʱǽʮλĵַ߷ֳɰλλ֣Ϊ25616źߣ212=28*24ڶݲʱǽʮַλֳɰλλ̲ͬǣλźַ߱ΪѡһźߺͰݣ212=28*2*23ͼεıʾʽͼ3.4ͼ3.5ʾ
FFFEFDFCA[7:0]3210A[11:8]1514131211109876543210efuse cellArraymux16FSOURCE ͼ3.4 ģʽµֲַʾͼ
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ڳյE-fuse洢·о 55nmյ4K E-fuse·
Ҫÿһ洢ռѡʱɿźʵźŷֱΪwl_wbwl_rֱƶͱ̲ÿʱ䵥λʱE-fuseʹӱ̵ݶźwl_wb<255:0>wl_r <255:0>
FFFEFDFCA[7:0]efuse cellArray3210bit line1514131211109876543210A8mux2mux2mux2mux2mux2mux2mux2mux2QOUT[n]76543210 n=ͼ3.5 ģʽµֲַʾͼ
3.1.4 ·
õ·ڲͬcorner¹Cadence¶Ե·ģ棬乤£
VDQ=3.3VTEMP=25Corner=TT ѹVDQ=2.8VVDQ=3.3VVDQ=3.6V ¶TEMP=-40棬TEMP=25棬TEMP=125
Corner=TTCorner=FFCorner=FSCorner=SFCorner=SS ͬĹջ¶Ե·Cadence棬µҪ
3.2 E-fuseԪ
E-fuseԪ·Ƶĵ·ΪؼҲ·ĺģE-fuseƼҲ·ĹؼĺûֱӰ·
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55nmյ4K E-fuse· ڳյE-fuse洢·о
ܡ˵·ܹ4096E-fuseԪɣÿһԪ·洢һλݣܹ洢Ϊ4Kڵ·д洢Ԫ϶࣬Աάֵ·ĿɿԵ£ܵĽʡ·ĵ·Ʋ˽Ƚ55nmĹճߴ硣
3.2.1 ͳE-fuseԪ·
E-fuseͳԪ·ͼ3.6ʾ·N0DZNMOSܣN1ǺNMOSܣͨ·Fsource˾fuse˿ͿN0ʵֵģͨ·Fsource˾fuseN1ܣ洢ͨN1λBLϡ·ͼN1ΪҪǿǵ״̬£QһߵѹN1ñܣN1©ӶҪĴN0ñҪǿŻN0ñN0ܹդĸߵѹδڿɿԵĻ½һأN0ܲñʵ֡RWLźſƵ·BSźźWLźŹͬƵ·̲FsourceźŶΪ·ʱṩVDQѹfuseΪྦྷ˿ʼֵСԼΪ300ŷķfuseͨ㹻ĵ۶ϺֹܴԼΪ2000ŷķң൱ڿ·
BLRWLfuseQN0
ͼ3.6 E-fuse cell·
N1FsourceBSWL16